Pr. Mathieu SALAUN
Fonction : Professeur des Universités - Praticien Hospitalier
Groupe : Quantif
Publications
80 documents
- O. Lorret, B. Dittert, M. Salaun, M. Zelsmann, B. Kosmala, et al.. Hydrophobic control of multi-functionalized Polyhedral Oligomeric Silsesquioxane (POSS) materials; effect on Block Co-Polymer (BCP) self-assembly. Micro- and Nano-Engineering conference- MNE 2012, Sep 2012, Toulouse, France. ⟨hal-00809055⟩
- M. Salaun, O. Lorret, B. Dittert, D. Borah, B. Kosmala, et al.. PS-b-PDMS block copolymer directed self-assembly by topographical and chemical substrate engineering. 4th International Conference on NANO-structures SElf-Assembly - NANOSEA 2012, Jun 2012, Santa Margherita di Pula, Italy. ⟨hal-00809052⟩
- D. Borah, A. Francone, C. Simao, O. Lorret, M. Salaun, et al.. Soft Graphoepitaxy for Directed Sel-assemblly of Block Copolymers on Nanoimprinted POSS Substrates. 28th International Conference of Photopolymer Science and Technology - CPST, Jun 2012, chiba, Japan. ⟨hal-00808931⟩
- M. Salaun, M. Zelsmann, O. Lorret, B. Dittert, D. Borah, et al.. Control of the PS-b-PDMS directed self-assembly by silsesquioxane-based graphoepitaxial substrate engineering. Electron, Ion, and Photon Beam technology and Nanofabrication conference - EIPBN 2012, 2012, Waikoloa, Hawai,, United States. ⟨hal-00809062⟩
- C. Simao, A. Francone, D. Borah, O. Lorret, M. Salaun, et al.. Soft graphoepitaxy of hexagonal PS-b-PDMS on nanopatterned POSS surfaces fabricated by nanoimprint lithography. Journal of Photopolymer Science and Technology, 2012, vol. 25, p. 239. ⟨hal-00808928⟩
- M. Salaün, N. Kehagias, M. Le Gallic, C.M Sotomayor Torres, M. Zelsmann. Direct patterning and ordering of diblock copolymers through nanoimprint lithography. Micro- and Nano-Engineering conference- MNE 2011, Sep 2011, Berlin, Germany. ⟨hal-00634124⟩
- M. Salaün, N. Kehagias, B. Salhi, T. Baron, J. Boussey, et al.. Direct top-down ordering of diblock copolymers through nanoimprint lithography. Electron, Ion, and Photon Beam technology and Nanofabrication conference - EIPBN 2011, May 2011, Las Vegas (USA), United States. ⟨hal-00634129⟩
- Amelie Salaun, Simon B Newcomb, Ian Povey, Mathieu Salaün, Lynette Keeney, et al.. Nucleation and Chemical Transformation of RuO 2 Films Grown on (100) Si Substrates by Atomic Layer Deposition. Chemical Vapor Deposition, 2011, 17 (4-6), pp.114-122. ⟨10.1002/cvde.201006882⟩. ⟨hal-02569377⟩
- N. Kehagias, T. Kehoe, M. Chouiki, M. Salaün, M. Zelsmann, et al.. Materials, processes and quality inspection methods for photonic and bio related applications. ImagineNano conference, 2011, Bilbao, Spain. ⟨hal-00634128⟩
- M. Salaün, N. Kehagias, B. Salhi, T. Baron, J. Boussey, et al.. Direct top-down ordering of diblock copolymers trough nanoimprint lithography. Journal of Vacuum Science and Technology, 2011, B, 29, pp.06F208-1-06F208-5. ⟨hal-00647409⟩
Documents récupérés de l'archive ouverte HAL 