Pr. Mathieu SALAUN
Fonction : Professeur des Universités - Praticien Hospitalier
Groupe : Quantif
Publications
80 documents
- W. Khunsin, C. Simao, D. Tuchapsky, A. Amman, M. Salaun, et al.. Nanometrology for self-assembly nanofabrication method. 9th International Conference on Industrial Dimensional Metrology, Metromeet 2013, Mar 2013, Bilbao, Spain. ⟨hal-00860944⟩
- M. Salaun, M. Le Gallic, E. Picard, M. Zelsmann. In-situ visualization and order quantification of symmetric diblock copolymer directed self-assembly. Thin Solid Films, 2013, 543, pp.148. ⟨hal-00860982⟩
- F. Diot, F. Stehlin, A. Gwiazda, A. Dirani, M. Salaun, et al.. Local reorganization of diblock copolymer domains in directed self-assembly followed by in situ high-temperature AFM. Langmuir, 2013, 29, pp.12796. ⟨hal-00946830⟩
- M. Salaun, M. Zelsmann, S. Archambault, D. Borah, N. Kehagias, et al.. Fabrication of highly ordered sub-20 nm silicon nanopillars by block copolymer lithography combined with resist design. J. Mat. Chem. C, 2013, 1, pp.3544. ⟨hal-00860938⟩
- Mathieu Salaun, M. Le Gallic, E. Picard, M. Zelsmann. Direct visualization and order quantification on self-ordering of diblock copolymers. Thin Solid Films, 2013, 543, pp.148-152. ⟨hal-00857614⟩
- Dipu Borah, Claudia Simao, Ramsankar Senthamaraikannan, Sozaraj Rasappa, Achille Francone, et al.. Soft-graphoepitaxy using nanoimprinted polyhedral oligomeric silsesquioxane substrates for the directed self-assembly of PS-b-PDMS. European Polymer Journal, 2013, 49 (11), pp.3512. ⟨10.1016/j.eurpolymj.2013.08.011⟩. ⟨hal-00946828⟩
- M. Salaun, S. Vayssières, S. Archambault, M. Zelsmann. Large-scale processing and graphoepitaxy of PS-b-PDMS. Workshop on Patterning by Self Assembly and Advanced Self Assembled materials for CMOS applications, Oct 2012, Intel Ireland, Leixlip, Ireland. ⟨hal-00808933⟩
- C. Simao, N. Kehagias, D. Borah, B. Kosmala, M. Salaun, et al.. Directed self-assembly of block copolymers mediated by solvent assisted NIL. Nanoimprint and Nanoprint Technology conference - NNT 2012, Oct 2012, napa, United States. ⟨hal-00809074⟩
- C. Simao, N. Kehagias, D. Borah, B. Kosmala, M. Salaun, et al.. Sub-20 nm nanofabrication via solvent-vapors nanoimprint directed selfassembly of block copolymers. Micro- and Nano-Engineering conference- MNE 2012, Sep 2012, Toulouse, France. ⟨hal-00809073⟩
- M. Salaun, S. Vayssières, S. Archambault, C. Simao, N. Kehagias, et al.. PS-b-PDMS nano-imprinting: A path for high throughput ultrahigh resolution lithography. Micro- and Nano-Engineering conference- MNE 2012, Sep 2012, Toulouse, France. ⟨hal-00809054⟩
Documents récupérés de l'archive ouverte HAL 